To use AFM/STM device as technological tool it is necessary to provide
access to any point of a sample during just the same lithography session
or during the next lithographic session. The task was realized by connection
of a AFM device with software package NanoMaker initially developed
for control of an e-beam lithography. In comparison to e-beam lithography
AFM/STM device has very essential and unpleasant future hysteresis of
motors for cantilever movement. An example of such distortion can be
seen on Fig.1a.
Fig. 1a. Due to hysteresis area of a bottom-left 1um square
is four times lager then a top-right one
Fig. 1b. After correction of hysteresis 1% accuracy could
be achieved in scanning field.
A special procedure was developed to measure hysteresis characteristics
of any AFM/STM device. Then a additional correction procedure was implemented
to package NanoMaker to compensate hysteresis errors "on fly".
As result accuracy about 1% across a scanning field could be provide
by the software (Fig.1b).