NanoMaker
Download
Examples of Use
Support
White Papers
Contacts
NanoMaker
Download
Examples of Use
Alignment and Successive Lithography
Large Area Exposure with Automatic Stitching by Alignment
2D Proximity Effect Correction
3D Proximity Effect Correction
Ultra High Resolution
Fabrication of OVD
Diffractive Optics
Dynamic Errors Correction
AFM Control
Integration with Laser Interferometer Controlled Stage
Gas Assisted Focused Electron Beam Induced Deposition
Sharp Tips Direct Writing
Orion Helium-Ion Microscope Control
Support
White Papers
Contacts
Site search
by Google
3D Proximity Correction and 3D Structuring
3D Proximity Correction and 3D Structuring
kinoform optics
Using 3D proximity correction and electron lithography objects with arbitrary 3D shape could be created during a single exposure session.
Copyright © 2002-2020 Interface Ltd. & IMT RAS