The efficient software package for the structure design and simulation of imaging properties of diffraction optical elements has been developed
The efficient software package for the structure design and simulation of imaging properties of diffraction optical elements has been developed
January 30, 2013
The efficient software package for the structure design and simulation of imaging properties of diffraction optical elements has been developed. It operates with point source and consists of:
the ZON software, to calculate the structure of an optical element in transmission and reflection;
the KRGF software, to simulate the diffraction properties of an ideal optical element with point source;
the DS software, to calculate the diffraction properties by taking into consideration material and shadowing effects.
Optional software allows simulation with a real non-point source. Zone plate thickness profile, source shape as well as substrate curvature are considered in this calculation. This is especially important for the diffractive focusing elements and gratings at a total external reflection, given that the lateral size of the structure can be up to one meter.
The program package can be used in combination with the NanoMaker software to prepare data for ion and e-beam surface modifications and corrections.
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