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A few photos of "deep" X-ray diffraction gratings based on Si (400) crystal were publishedOctober 10, 2014 A few photos of "deep" X-ray diffraction gratings based on Si (400) crystal were published in our Image Gallery. The images show diffraction gratings produced on surface of Si wafer using e-beam lithography and reactive ion etching (ECR plasma) technologies. The photos courteously supplied by our users from IMT RAS, Chernogolovka, Russia. |
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