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Fragment of the last zones at the monochromator crystal of 30 by 30 mm overall size.

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Fragment of the last zones at the monochromator crystal of 30 by 30 mm overall size. Thickness of a gold phase shifting layer is equal to 150 nm.

Fragment of the last zones at the monochromator crystal of 30 by 30 mm overall size.
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Strips of width near 40 nm created in PMMA resist
1. Strips of width near 40 nm created in PMMA resist
A part of Bragg-Fresnel zone plate designed...
2. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
3. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
4. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
5. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
6. A part of Bragg-Fresnel zone plate designed...
Fragment of the last zones at the monochromator...
7. Fragment of the last zones at the monochromator...
Strips of 40 nm width in resist
8. Strips of 40 nm width in resist
A part of Bragg-Fresnel zone plate designed...
9. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate
10. A part of Bragg-Fresnel zone plate
System of lenses at the second monochromator...
11. System of lenses at the second monochromator...
Reflection Zone Plates for focusing X-rays
12. Reflection Zone Plates for focusing X-rays
A part of Bragg-Fresnel zone plate designed...
13. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
14. A part of Bragg-Fresnel zone plate designed...
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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