Two-dimensional semiconductor photonic crystal with a hexagonal lattice of submicrometer holes

A. Nashchekin, E. Arakcheeva, E. Tanklevskaya
Diagnostic of Solid State Structures and Materials Center, Ioffe Physico-Technical Institute RAS, St. Petersburg, Russia
Equipment: SEM CamScan Series 4 DV100

Two-dimensional semiconductor photonic crystal with a hexagonal lattice of submicrometer holes is produced by etching the GaAs/AlGaAs planar structure containing the InAs/InGaAs quantum dots in the waveguide layer

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