Photonic crystal for visible wavelengths made of perforated Si₃N₄. Free standing membrane

J. Kouba
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

Photonic crystal for visible wavelengths made of perforated Si₃N₄. Hexagonal lattice of air holes.

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