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A part of Bragg-Fresnel zone plate

A. Firsov
Application Center for Microengineering, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage

A part of Bragg-Fresnel zone plate designed for X-ray optics and spectroscopy.

A part of Bragg-Fresnel zone plate
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More images from Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
(Click on image for close view)
Strips of width near 40 nm created in PMMA resist
1. Strips of width near 40 nm created in PMMA resist
A part of Bragg-Fresnel zone plate designed...
2. A part of Bragg-Fresnel zone plate designed...
System of lenses at the second monochromator...
3. System of lenses at the second monochromator...
A part of Bragg-Fresnel zone plate designed...
4. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate
5. A part of Bragg-Fresnel zone plate
A part of Bragg-Fresnel zone plate designed...
6. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
7. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
8. A part of Bragg-Fresnel zone plate designed...
Fragment of the last zones at the monochromator...
9. Fragment of the last zones at the monochromator...
Strips of 40 nm width in resist
10. Strips of 40 nm width in resist
A part of Bragg-Fresnel zone plate designed...
11. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
12. A part of Bragg-Fresnel zone plate designed...
A part of Bragg-Fresnel zone plate designed...
13. A part of Bragg-Fresnel zone plate designed...
Reflection Zone Plates for focusing X-rays
14. Reflection Zone Plates for focusing X-rays
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
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