Fragment of hexagonal lattice type photonic crystal at intermediate technology step
J. Kouba
Application Center for Microengineering,
Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II, Berlin, Germany
Equipment: SEM LEO 1560, TSL laser interferometer controlled stage
Nickel metal islands after successful lift off process. Intermediate step for fabrication of the pillars in silicon nitride to produce hexagonal lattice type photonic crystal.
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