Fabrication of rainbow hologram with NanoMaker  Fabrication of Rainbow Hologram with NanoMaker
 NanoMaker  Download  Examples of Use  Support  White Papers  Contacts 
English      Russian
 NanoMaker
 Overview
 Functions
 Products
 Pattern Generator
 Image Gallery
 Download
 Examples of Use
 Support
 White Papers
 Contacts
Site search by Google
Рейтинг@Mail.ru  eXTReMe Tracker
Image galery walker

"Deep" X-ray diffraction gratings based on Si (400) crystal

М. Knyazev, V. Starkov, D. Roshchupkin
IMT RAS , Chernogolovka, Russia
Equipment: SEM Zeiss EVO 50

Diffraction grating is a profiled surface of Si wafer in the form of a square consisting of a set of parallel Si strips, separated by an air space. Overall size of the square is 400 x 400 um2. The depth of the grating is 2.5 um at period 1 um. Accordingly, the aspect ratio of the diffraction grating is ~ 5. To create grating, first, a topological profile in resist was made using electron beam lithography. Then thin metal film of Cr was deposited on the surface. This film with the help of explosive lithography "lift-off" formed metal mask for subsequent etching. At final step, formation of the grid structure in the Si was carried out by reactive ion etching (ECR plasma).

Side view of the Si diffraction grating with period of 1 um.

"Deep" X-ray diffraction gratings based on Si (400) crystal
Back to Image Gallery

More images from other authors

Strips of 40 nm width in resist A. Firsov; Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
Strips of 40 nm width in resist... More...
Superconducting Hot-Electron Bolometer Mixer for Terahertz Heterodyne G.Goltsman, K. Smirnov, N.Kaurova et al.; MSPU
Superconducting Hot-Electron Bolometer Mixer for Terahertz Heterodyne Receivers... More...
Real fabricated Si<sub>3</sub>N<sub>4</sub> photonic crystal sample J. Kouba; Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, BESSY II
Real fabricated Si3N4 photonic crystal sample... More...
Quantum state detector V. Gurtovoi, A. Firsov; IMT RAS
Quantum state detector... More...
Artificial defect in 2D photonic crystal A. Nashchekin, E. Arakcheeva, E. Tanklevskaya; Ioffe Physico-Technical Institute RAS
Artificial defect in 2D photonic crystal... More...
Selective growth of single-walled carbon nanotubes and fabrication of Y. Kasumov et al.; IMT RAS1 and ISSP RAS2
Selective growth of single-walled carbon nanotubes and fabrication of devices on their base... More...
Site name written on a single thread-like GaAs crystal Yu. Petrov, Prof. O. Vyvenko; St. Petersburg State University
Site name written on a single thread-like GaAs crystal... More...
Single receiving element of superconducting terahertz hot-electron bol A. Vystavkin, A. Kuzmin, S. Shitov, A. Kovalenko, I. Kon, A. Uvarov, et al.; Institute of Radioengineering and Electronics (IRE) of RAS
Single receiving element of superconducting terahertz hot-electron bolometer incorporated into a planar antenna... More...
Submicron bismuth (Bi) wires E. Konstantinov, E. Demidov; Herzen State Pedagogical University
Submicron bismuth (Bi) wires... More...
Multiple superconducting ring ratchet V. Gurtovoi2, V. Antonov1; Royal Holloway University1
Multiple superconducting ring ratchet... More...
More images from IMT RAS
(Click on image for close view)
"Deep" X-ray diffraction gratings...
1. "Deep" X-ray diffraction gratings...
"Deep" X-ray diffraction gratings...
2. "Deep" X-ray diffraction gratings...
"Deep" X-ray diffraction gratings...
3. "Deep" X-ray diffraction gratings...
"Deep" X-ray diffraction gratings...
4. "Deep" X-ray diffraction gratings...
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                   
 
    Copyright © 2002-2020 Interface Ltd. & IMT RAS