Is it possible to use the SEM-based lithography in the mechanical field? Is there any other application for the NanoMaker where we can apply it? Is it possible to use the SEM-based lithography in the mechanical field?
A:
Yes, EBL can be used for fabrication of micromechano-electrical system (MEMS, NEMS) like highfrequecy resonator, micro accelrometer, superhydrofobic surfaces and others.