Could the system be activated and deactivated on the SEM easily, because the SEM system needed to be available for both SEM and Lithography?
A:
Yes, we don't install anything inside the chamber. The only things we control are the deflection system, motorized stage and beam blanker. We attach our Pattern Generator to Ext. Scan interface socket (on the rear board) and switch between internal scan and external scan using our software commands. When our software (computer) is switched off, the SEM is working in usual mode.
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